KLA CORPORATION Federal Contracts — Government Award History

Total (All Time)$6M
Latest FY$347,402
Primary AgencyDepartment of Defense

KLA CORPORATION has received $6M in total federal contract awards
across 4 fiscal year(s). ▼ 91.5% vs FY2023 Peak year was FY2023 ($4M).
Primary awarding agency: Department of Defense.

Data covers largest contracts by award amount. Source: USASpending.gov (FPDS).

Awards by Fiscal Year

Year Spending Total Contracts Top Agency
FY2025

$347,402 6건 Department of Defense
FY2023

$4.1M 5건 Department of Defense
FY2022

$650,983 3건 Department of Defense
FY2021

$1.2M 3건 Department of Commerce

Notable Contracts

Date Agency Amount Description
2023-09-26 Department of Defense $2.3M KLA/SPTS SIC TRENCH ETCH TOOL
2023-09-20 Department of Commerce $1.7M RIE05- ELECTRICAL STATIC CHUCK BASED DEEP REACTIVE ION ETCHING SYSTEM WITH 4 YEA
2021-09-23 Department of Commerce $1.2M DEEP REACTIVE ION ETCHING (DRIE) IS A CRITICAL FABRICATION SYSTEM REQUIRED FOR M
2022-08-31 Department of Defense $320,271 NANOMECHANICAL TESTER
2022-01-11 Department of Defense $300,000 KLA SOFTWARE RENEWAL
2025-09-18 Department of Defense $248,751 THE IMICRO INCLUDES THE IQWAVE2(TM) ADVANCED CONTROLLER, ENHANCING PRECISION AND
2024-05-31 Department of Defense $114,663 KLA P-7 UNIT TO DESIGN, FABRICATE, ASSEMBLE, BUILD, TEST, EVALUATE, VERIFY, VALI
2026-04-02 Department of Commerce $52,429 OU73-FY26-055-NEW NANOSWIFT CONTROLLER
2021-09-01 National Aeronautics and Space Administration $45,614 PREVENTATIVE MAINTENANCE
2022-06-14 Department of Commerce $30,712 UPGRADE OF A NIST OWNED NANO INDENTER XP SYSTEM
2023-08-03 Department of Defense $30,000 G200 NANO INDENTER
2024-12-01 National Aeronautics and Space Administration $29,400 MAINTENANCE OF PROFILOMETER
2023-01-09 Department of Commerce $28,718 REPLACEMENT AND SERVICE TO REPAIR SPTS OMEGA C2L RAPIER ETCH SYSTEM
2023-12-01 National Aeronautics and Space Administration $28,000 MAINTENANCE SPPX01
2024-11-05 National Aeronautics and Space Administration $19,499 REPAIR OF KLA STYLUS PROFILOMETER
2025-03-06 Department of Defense $19,439 PART#0856122-000, SPECIAL, UPGRADE, XACTIX RE ASSY, COMP, E2, WIN11KIT INCLUDES:
2025-12-12 Department of Defense $19,315 XACTIX RE UPGRADE
2025-02-06 Department of Defense $17,988 REPAIR SITE VISIT FOR INSTRUMENT KLA D120
2023-05-08 Department of Commerce $13,959 CHILLER FOR SPTS OMEGA C2L RAPIER ETCH SYSTEM
2025-09-16 Department of the Treasury $12,324 VSM POWDER TESTING CUPS